| 000 | 00817 a2200265 4500 | ||
|---|---|---|---|
| 001 | 79636 | ||
| 020 | _a3-908450-40-36 | ||
| 041 | _aeng | ||
| 080 | _a621.382 Int:4:98 | ||
| 245 | _aUltra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS'98), Ostend, Belgium, Sept. 21-23, 1998 / edited by Marc Heyns, Marc Meuris and Paul Mertens | ||
| 250 | _a | ||
| 260 | _a | ||
| 260 | _bUetikon-Zuerich : Scitec Pub., 1999 | ||
| 260 | _c1999 | ||
| 300 | _axiv,301 p. | ||
| 300 | _c24 cm | ||
| 490 | _a | ||
| 100 | _aInternational symposium on ultra clean processing of silicon | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aUltrasonic cleaning-Congresses | ||
| 650 | _aSilicon-surfaces-Congresses | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c103867 _d103867 |
||