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Silicon carbide microelectromechanical systems for harsh environments

by | Cheung, Rebecca | Cheung, Rebecca.

Series: Edition: Language: English Publication details: London ; Imperial College Press ; 2006Availability: Items available for loan: 1 Call number: 621.317.3:661.665Sil.

Fabrication and study of mems devices based on silicon carbide (R)

by Tyagi, Devesh | Dusane, R.O.

Series: Edition: Language: English Publication details: Mumbai ; IIT ; 2012Availability: Items available for reference: Not for loan (1) Call number: 043:621.382:620.168Tya.

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