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Microelectronic processing : an introduction to the manufacture of integrated circuits

by Ruska, W. Scot.

Series: McGraw-Hill series in electrical engineering Language: English Publication details: New York McGraw-Hill Book Company 1987Availability: Items available for loan: 1 Call number: 621.372:621.382 Rus.

Integrated circuit fabrication : science and technology

by Plummer, James D [Author] | Griffin, Peter B [Author].

Language: English Publication details: Cambridge Cambridge University Press 2023Availability: Not available: On hold (1).

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