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		Microsystem design by Senturia, Stephen D \| . Series: Edition: Language: English Publication details: Boston ; Kluwer Academic Pub. ; 2001Availability: Items available for loan: 1 Call number: 621.382Sen. Place hold Add to cart (remove)
		Fundamentals of microfabrication by Madou, Marc \| . Series: Edition: Language: English Publication details: Boca Raton ; CRC Press ; 1997Availability: Items available for loan: 1 Call number: 621.372:621.382Mad. Place hold Add to cart (remove)
		Methodology for the modeling and simulation of microsystems by Romanowicz, Bartlomiej F \| . Series: MicrosystemsEdition: Language: English Publication details: Boston ; Klumer Academic ; 1998Availability: Items available for loan: 1 Call number: 621.382:681.3Rom. Place hold Add to cart (remove)
		Smart mems and sensor systems by Gaura, Elena \| Newman, Robert \| . Series: Edition: Language: English Publication details: London ; Imperial College Press ; 2006Availability: Items available for loan: 1 Call number: 621.382:621.317.3Gau. Place hold Add to cart (remove)
		Modeling MEMS and NEMS by Pelesko, John A \| Bernstein, David H \| . Series: Edition: Language: English Publication details: Boca Raton ; Chapman and Hall/CRC ; 2003Availability: Items available for loan: 1 Call number: 621.382:519.28Pel. Place hold Add to cart (remove)
		Smart sensors and MEMS by \| Yurish, Sergey Y \| Yurish, Sergey Y. Series: NATO science series II : mathematics, physics and chemistry ; v.181Edition: Language: English Publication details: Netherlands ; Kluwer Academic Pub. ; 2004Availability: Items available for loan: 1 Call number: 621.382:621.317.3Sma:03. Place hold Add to cart (remove)
		RF MEMS and their applications by Varadan, Vijay K \| Vinoy, K.J \| Jose, K.A \| . Series: Edition: Language: English Publication details: Chichester ; Wiley ; 2003Availability: Items available for loan: 1 Call number: 621.396.6:621.382Var. Place hold Add to cart (remove)
		Nano- and micro- electromechanical systems : fundamentals of nano- and microengineering by Lyshevski, Sergey Edward \| . Series: Nano-and microscience, engineering, technology and medicine seriesEdition: 2nd ed Language: English Publication details: Boca Raton ; CRC Press ; 2005Availability: Items available for loan: 1 Call number: 621.382Lys(2). Place hold Add to cart (remove)
		MEMS : a practical guide to design, analysis and applications by \| Korvink, Jan G \| Korvink, Jan G. Series: Edition: Language: English Publication details: Norwich ; William Andrew/Springer ; 2006Availability: Items available for loan: 1 Call number: 621.317.3MEM. Place hold Add to cart (remove)

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