Reactive sputter deposition

Contributor(s): Depla, Diederik [Editor] | Mahieu, Stijn [Editor]Language: English Series: Springer series in materials sciencePublication details: Berlin Springer-Verlag 2010Description: xviii,570 p. 24 cmISBN: 978-3-642-09536-8Subject(s): Electronics | Cathode sputtering(Plating process) | Thin films
List(s) this item appears in: Display List 04/02/2019-10/02/2019
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Item type Current library Call number Status Date due Barcode Item holds
Books Books Central Library, IITB
General Stacks 		621.382:539.23 Rea Available 243406
Total holds: 0

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