Optical and dimensional-measurement problems with photomasking in microelectronics

Contributor(s): Language: English Series: NBS SMT SP - 400 - 20 : 1975Publication details: Washington, D.C. ; National Bureau of standards ; 1975Edition: Description: 40 p; ISBN: Subject(s): | Integrated circuits, Microelectronics, Micrometrology, Photolithography, PhotomaskOnline resources: Click here to access online
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Pamphlets Standards Reports Pamphlets Standards Reports Central Library, IITB
LNBS SMT SP - 400 - 20 : 1975 Not for loan A41083
Total holds: 0

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