Traps and trap generation in ultrathin jet vapor deposited, JVD, silicon nitride gate dielectrics (R)

By: ManjulaRani, K.N [Author]Contributor(s): Vasi, J.M [Supervisor] | Ramgopal Rao, V [Supervisor] | Indian Institute of Technology Bombay Department of Electrical EngineeringLanguage: English Publication details: Bombay IIT 2004Description: xxii,146 p; 30 cmSubject(s): Vasi, J.M. and Ramgopal Rao, V | Theses and Dissertations | Silicon nitride | Vapor deposition | Dielectric devices | Metal oxide semiconductors field-effect transistorsDissertation note: Thesis Ph.D Indian Institute of Technology Bombay. Department of Electrical Engineering 2004
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Theses and Dissertations Theses and Dissertations Central Library, IITB
Pamphlet Section (Theses, Standards, Reports)
043:621.382.3:621.315.61 Man Not for loan D08A26 202529
Total holds: 0

Thesis Ph.D Indian Institute of Technology Bombay. Department of Electrical Engineering 2004

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