Normal view MARC view

Entry Personal Name

Number of records used in: 1

001 - CONTROL NUMBER

  • control field: 50124

003 - CONTROL NUMBER IDENTIFIER

  • control field: OSt

005 - DATE AND TIME OF LATEST TRANSACTION

  • control field: 20230807121403.0

008 - FIXED-LENGTH DATA ELEMENTS

  • fixed length control field: 230607|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

  • Original cataloging agency: OSt
  • Transcribing agency: OSt

100 ## - HEADING--PERSONAL NAME

  • Personal name: Campbell, Stephen A.
  • Relator term: Author

670 ## - SOURCE DATA FOUND

  • Source citation: Work cat.: (OSt)296939: Campbell, S. A., Science and engineering of microelectronic fabrication 2nd ed., 2001