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Plasma Immersion Ion Implantation (PIII) (Topical Term)

Preferred form: Plasma Immersion Ion Implantation (PIII)

Machine generated authority record.

Work cat.: (OSt)276910: Sushama 13938, Investigating optical, structural and elemental properties of P mono-doped and B-P Co-doped Zn (Mg)O thin films implanted using PIII technique (R), 2019

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