Plasma process induced damage during VLSI device fabrication (R) (Record no. 208126)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00639 a2200265 4500 |
| 001 - CONTROL NUMBER | |
| control field | 291966 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Universal Decimal Classification number | 043:621.382:537.56Pra |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Prasad, Ashwin |
| 245 ## - TITLE STATEMENT | |
| Title | Plasma process induced damage during VLSI device fabrication (R) |
| 250 ## - EDITION STATEMENT | |
| Edition statement | |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Mumbai |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | IIT |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | vi,61 p. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Dimensions | 30 cm |
| 490 ## - SERIES STATEMENT | |
| Series statement | |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Dusane, R. O. and Rao, V. Ramgopal |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Theses and Dissertations |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics-Reliability , Plasma devices |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Dusane, R. O. and Rao, V. Ramgopal |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Theses and Dissertations |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Cost, replacement price | Price effective from | Koha item type | Public note | Shelf |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Central Library, IITB | Central Library, IITB | 02/02/2018 | 0.00 | 043:621.382:537.56Pra | 199551 | 02/02/2018 | 0.00 | 02/02/2018 | Theses and Dissertations | D06B06 | D06B06 |