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Ion implantation in semiconductors : silicon and germanium

Mayer, James W.

Ion implantation in semiconductors : silicon and germanium - - New York Academic Press, 1970 - xiii,280 p. 23.5 cm - .

ISBN: 1

Subjects--Topical Terms:

Semiconductors
Ion implantation
Silicon
Germanium

Universal Decimal Class. No.: 537.311.3 May(2)

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