Ion implantation in semiconductors : science and technology / edited by Susumu Namba
Ion implantation in semiconductors : science and technology / edited by Susumu Namba - - New York Plenum Press, 1975 - xv,742 p. 24.5 cm - BSI 903 : part - A49 : 1984 .
0-306-30841-X0
Ion implantation-Congresses
Semiconductors, Effect of radiation on-Congresses
Metals, Effect of radiation on-Congresses
621.382 Ion:4:74