Polycrystalline silicon for integrated circuit applications
Kamins, Ted
Polycrystalline silicon for integrated circuit applications - - Boston Kluwer Academic Pub., 1988 - xii,290 p. 23 cm - .
0-89838-259-98
Integrated circuits-Materials
Silicon-Electric properties
621.372:621.382 Kam
Polycrystalline silicon for integrated circuit applications - - Boston Kluwer Academic Pub., 1988 - xii,290 p. 23 cm - .
0-89838-259-98
Integrated circuits-Materials
Silicon-Electric properties
621.372:621.382 Kam