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Chemical vapor deposition : thermal and plasma deposition of electronic materials

Sivaram, S.

Chemical vapor deposition : thermal and plasma deposition of electronic materials - - New York : Van Nostrand Reinhold, 1995 1995 - xii,292 p. 23.5 cm - .

ISBN: 0-442-01079-625

Subjects--Topical Terms:

Microelectronics industry
Chemical vapor deposition
Microelectronics-Materials

Universal Decimal Class. No.: 621.382:621.793 Siv

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