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Tantalum thin films

Westwood, W.D.

Tantalum thin films - - London Academic Press, 1975 - xiii,436 p. 22.5 cm - .

ISBN: 0-12-744750-43

Subjects--Topical Terms:

Thin films
Tantalum films
Hybrid integrated circuits

Universal Decimal Class. No.: 621.372:621.382 Wes

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