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Semiconductors for micro and nanotechnology : an introduction for engineers

Korvink, Jan G.

Semiconductors for micro and nanotechnology : an introduction for engineers - - Weinheim Wiley-VCH 2002 - 340 p. 24 cm - .

ISBN: 3-527-30257-3

Subjects--Topical Terms:

Semiconductors , Microstructures , Nanotechnology

Universal Decimal Class. No.: 537.311.33Kor

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