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Mechanical microsensors

Elwenspoek, M.

Mechanical microsensors - - Berlin Springer 2001 - x,295 p. 24 cm - .

ISBN: 3-540-67582-5

Subjects--Topical Terms:

Detectors-Design and construction , Microelectromechanical systems-Design and construction ,Transducers , Silicon , Micromachining

Universal Decimal Class. No.: 621.317.3Elw

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