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SiO2 in Si microdevices

Itsumi, Manabu

SiO2 in Si microdevices - - Berlin Springer 2002 - xiii,322 p. 24 cm - .

ISBN: 3-540-43339-2

Subjects--Topical Terms:

Silicon dioxide , Silicon devices

Universal Decimal Class. No.: 621.382:669.782Its

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