VLSI electronics : microstructure science / edited by Norman G. Einspruch, Simon S. Cohen and Gennady Sh. Gildenblat
VLSI electronics : microstructure science / edited by Norman G. Einspruch, Simon S. Cohen and Gennady Sh. Gildenblat - - Orlando Academic Press, 1987 - v.15 23.5 cm - .
0-12-234115-59
Metallic films
Integrated circuits-Very largescale integration
621.372:621.382 VLS-15