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MEMS and NEMS : systems, devices and structures

Lyshevski, Sergey Edward

MEMS and NEMS : systems, devices and structures - - Boca Ratan CRC Press 2002 - 461 p. 24 cm - .

ISBN: 0-8493-1262-0

Subjects--Topical Terms:

Electronics
Microelectromechanical systems

Universal Decimal Class. No.: 621.382Lys

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