APA

Campbell S. A., . (2001). Science and engineering of microelectronic fabrication. New York: Oxford University Press.

Chicago

Campbell Stephen A, . 2001. Science and engineering of microelectronic fabrication. New York: Oxford University Press.

Harvard

Campbell S. A., . (2001). Science and engineering of microelectronic fabrication. New York: Oxford University Press.

MLA

Campbell Stephen A, . Science and engineering of microelectronic fabrication. New York: Oxford University Press. 2001.