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Anodic oxidation of silicon in a microwave plasma disk reactor

Roppel, Thaddeus Adam

Anodic oxidation of silicon in a microwave plasma disk reactor - - n.p. Michigan State University, 1986 - xiii,221p. 21cm - .

ISBN: 1

Subjects--Topical Terms:

Metals-Anodic oxidation

Universal Decimal Class. No.: 621.372:621.382 Rop

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