Multiphysics modelling and simulation of electrostatically actuated microbeams using spectral element method (R)
Dileesh, P.V.
Multiphysics modelling and simulation of electrostatically actuated microbeams using spectral element method (R) - Mumbai IIT 2018 - xviii,171 p. 30 cm
Thesis
Theses and Dissertations
Automatic control
Microelectromechanical systems
Electrostatic apparatus and appliances
Finite element methods
Microactuators
043:621-52:681.3 Dil
Multiphysics modelling and simulation of electrostatically actuated microbeams using spectral element method (R) - Mumbai IIT 2018 - xviii,171 p. 30 cm
Thesis
Theses and Dissertations
Automatic control
Microelectromechanical systems
Electrostatic apparatus and appliances
Finite element methods
Microactuators
043:621-52:681.3 Dil