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Structure and properties of silicon dioxide films thermally nitrided in pure ammonia

Ruggles, Gray Alan

Structure and properties of silicon dioxide films thermally nitrided in pure ammonia - - Pennsylvania Pennsylvania State University, 1986 - 237 p. 20 cm - .

ISBN: 4

Subjects--Topical Terms:

Silicon dioxide

Universal Decimal Class. No.: 621.382 Rug

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