ARPA / NBS workshop IV. surface analysis for silicon devices
ARPA / NBS workshop IV. surface analysis for silicon devices
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- Washington, D.C. National Bureau of standards 1976
- 238 p.
- NBS SMT SP - 400 - 23 : 1976 .
Auger spectroscopy, Depth profiles, Electron beam induced imaging, ESCA, Insulator films
LNBS SMT SP - 400 - 23 : 1976
Auger spectroscopy, Depth profiles, Electron beam induced imaging, ESCA, Insulator films
LNBS SMT SP - 400 - 23 : 1976