Impurity diffusion and gettering in silicon : symposium, Boston, Nov. 27-30, 1984 / edited by R.B. Fair, Charles W. Pearce and Jack Washburn
Impurity diffusion and gettering in silicon : symposium, Boston, Nov. 27-30, 1984 / edited by R.B. Fair, Charles W. Pearce and Jack Washburn - - Pittsburgh Materials Research Society, 1985 - xiii,284 p. 23 cm - .
0-931837-01-40
Semiconductors-Defects-Congresses
Diffusion-Congresses
Semiconductor doping-Congresses
Getters-Congresses
537.311.33:548.526 Imp:84