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Physics of micro/nano-fabrication

Brodie, Ivor

Physics of micro/nano-fabrication - - New York : Plenum Press, 1992 1992 - xix,650 p. 25 cm - .

ISBN: 0-306-44146-235

Subjects--Topical Terms:

Microelectronics
Thin-film circuits

Universal Decimal Class. No.: 621.372:621.382 Bro

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