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Simulation of low pressure chemical vapour deposition reactor (R)

Pargaonkar, Vijay C.

Simulation of low pressure chemical vapour deposition reactor (R) - Mumbai IIT Bombay 1999 - x,81 p. 23 cm

Dissertation

Subjects--Topical Terms:
Theses and Dissertations
Chemical technology
Chemical vapour deposition
Chemical reactors

Universal Decimal Class. No.: 043:66.093:536.422/.423 / Par

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