Preparation of thin films of wide bandgap microcrystalline silicon carbon alloy using hot wire chemical vapour deposition (R)

Sanjay Kumar

Preparation of thin films of wide bandgap microcrystalline silicon carbon alloy using hot wire chemical vapour deposition (R) - - Mumbai IIT 1998 - 53 p. 28 cm - .




Dusane, R.O.
Theses and Dissertations
Thin films , Silicon Carbide , Chemical vapour deposition

043:621.793:669.782:539.23San

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