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Fabrication and characterization of microcantilever based sensor (R)

Haridwaj, Apurvee

Fabrication and characterization of microcantilever based sensor (R) - - Mumbai IIT 2013 - xi,88 p. 30 cm - .

ISBN:

Subjects--Topical Terms:
Khosla, N.K. and Venkataramani, N.
Theses and Dissertations
Microelectromechanical systems-Materials , Microstructures

Universal Decimal Class. No.: 043:620.168.3:621.317.3Har

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