Mechanical properties of amorphous hydrogenated silicon carbide thin films (R)
Patrikar, Kalyani
Mechanical properties of amorphous hydrogenated silicon carbide thin films (R) - - Mumbai IIT 2013 - v, 28 p. 30 cm - .
Dusane, R.O. and Pant, Prita
Theses and Dissertations
Silicon-carbide thin films , Amorphous semiconductors , Chemical vapor deposition
043:669.782:621.793Pat
Mechanical properties of amorphous hydrogenated silicon carbide thin films (R) - - Mumbai IIT 2013 - v, 28 p. 30 cm - .
Dusane, R.O. and Pant, Prita
Theses and Dissertations
Silicon-carbide thin films , Amorphous semiconductors , Chemical vapor deposition
043:669.782:621.793Pat