Fabrication and study of mems devices based on silicon carbide (R)

Tyagi, Devesh

Fabrication and study of mems devices based on silicon carbide (R) - - Mumbai IIT 2012 - 44 p, 30 cm - .




Dusane, R.O.
Theses and Dissertations
Microelectromechanical systems , Silicon carbide

043:621.382:620.168Tya

Powered by Koha