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Plasma immersion ion implantation (R)

Pohekar, Prachi

Plasma immersion ion implantation (R) - - Mumbai IIT 2011 - vi,48 p. 30 cm - .

ISBN:

Subjects--Topical Terms:
Pinto, R.
Theses and Dissertations
Metal oxide semiconductor field-effect transistors , Ion implantation

Universal Decimal Class. No.: 043:621.382.3Poh

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