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Themodynamic and kinetic investigation of the HWCVD process (R)

Adhikari, Subhra

Themodynamic and kinetic investigation of the HWCVD process (R) - - Mumbai IIT 2009 - xv,81 p. 30 cm - .

ISBN:

Subjects--Topical Terms:
Dusane, R.O. and Viswanathan, N.N.
Theses and Dissertations
Thermodynamics , Chemical vapour deposition

Universal Decimal Class. No.: 043:621.793:536.7Adh

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