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Mechanical characterization of amorphous silicon thin film alloy (R)

Patil, Vinod Pradip

Mechanical characterization of amorphous silicon thin film alloy (R) - - Mumbai IIT 2005 - xiii,60 p. 28 cm - .

ISBN:

Subjects--Topical Terms:
Dusane, Rajiv O. and Gandhi, Prasanna S.
Theses and Dissertations
Thin films-Mechanical properties , Silicon devices

Universal Decimal Class. No.: 043:539.23:669.782Pat

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