Factors influencing the formation of the ß-phase of silicon nitride during the nitridation of silicon
Campos-Loriz, Diego
Factors influencing the formation of the ß-phase of silicon nitride during the nitridation of silicon - - n.p. University of Leeds, 1976 - 147 p. 29 cm - .
0
Silicon nitride
621.785.532 Cam
Factors influencing the formation of the ß-phase of silicon nitride during the nitridation of silicon - - n.p. University of Leeds, 1976 - 147 p. 29 cm - .
0
Silicon nitride
621.785.532 Cam