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Fabrication of HWCVD microcrystalline silicon thin film transistors (R)

Tripathi, Swarnendu

Fabrication of HWCVD microcrystalline silicon thin film transistors (R) - - Mumbai IIT 2004 - x,62 p. 30 cm - .

ISBN:

Subjects--Topical Terms:
Dusane, R.O. and Venkataramani, N.
Theses and Dissertations
Chemical vapour deposition , Thin films , Silicon devices

Universal Decimal Class. No.: 043:669.782:539.23Tri

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