Study of hot wire chemical vapour deposited a-si:H and its alloys (R)

Patil, Samadhan Bhaulal

Study of hot wire chemical vapour deposited a-si:H and its alloys (R) - - Mumbai IIT 2003 - x,117 p. 28 cm - .




Dusane, R.O. and Misra, D.S.
Theses and Dissertations
Chemical vapour deposition , Silicon devices , Thin films

043:669.782:539.23Pat

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