Preparation and characterization of plasma enhanced chemical vapor deposited silicon dioxide and poly-oxide films (R)

Dixit, B.B.

Preparation and characterization of plasma enhanced chemical vapor deposited silicon dioxide and poly-oxide films (R) - - Bombay IIT 1991 - 207 p. 27 cm - .

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Srivastava, C.M. and Khokle, W.S.
Theses and Dissertations
Silicon Dioxide

043:621.382Dix

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