Preparation and characterization of plasma enhanced chemical vapor deposited silicon dioxide and poly-oxide films (R)
Dixit, B.B.
Preparation and characterization of plasma enhanced chemical vapor deposited silicon dioxide and poly-oxide films (R) - - Bombay IIT 1991 - 207 p. 27 cm - .
0
Srivastava, C.M. and Khokle, W.S.
Theses and Dissertations
Silicon Dioxide
043:621.382Dix
Preparation and characterization of plasma enhanced chemical vapor deposited silicon dioxide and poly-oxide films (R) - - Bombay IIT 1991 - 207 p. 27 cm - .
0
Srivastava, C.M. and Khokle, W.S.
Theses and Dissertations
Silicon Dioxide
043:621.382Dix