Chemical vapour deposition : precursors, processes and applications
Chemical vapour deposition : precursors, processes and applications
-
- Cambridge RSC Pub. 2009
- xv, 582 p. 25.5 cm
- .
978-0-85404-465-8
Metallization
Chemical vapour deposition
621.793:539.23Che
978-0-85404-465-8
Metallization
Chemical vapour deposition
621.793:539.23Che