Thermal oxidation of silicon in dry oxygen growth kinetics and charge characterization in the thin regime
Massoud, Hisham Zakaria
Thermal oxidation of silicon in dry oxygen growth kinetics and charge characterization in the thin regime - - n.p. Stanford Univ., 1983 - xx,258 p. 21.5 cm - .
3
Silicon oxide films
Metal insulator semiconductors-Congresses
Thin films-Electric properties
621.372:621.382 Mas
Thermal oxidation of silicon in dry oxygen growth kinetics and charge characterization in the thin regime - - n.p. Stanford Univ., 1983 - xx,258 p. 21.5 cm - .
3
Silicon oxide films
Metal insulator semiconductors-Congresses
Thin films-Electric properties
621.372:621.382 Mas